This paper presents a MEMS based Safety and Arming device for miniaturized precision fuze of 155mm munitions. Recently fuze for projectile munition is improving with smart and multifunctions. Conventional Safety and Arming device is occupied of many volume inside of fuze. In order to be additional loading for the smart projectile munition fuse there is a necessity which will reduce the size of S&A. In this paper, we shows that the fabrication of MEMS based high aspect ratio Safety and Arming device using UV-LIGA process and conventional LIGA process.
We tried to two main fabrication technologies, LIGA, which uses X-rays produced by a synchrotron to create high-aspect ratio structures, and UV LIGA, a more accessible method which uses ultraviolet light to create structures with relatively low aspect ratios.
In order for the safe arming system which is produced was the mechanical system which uses only an inertial force and a centrifugal force, to correspond in 155mm firing conditions, it was produced. And this miniaturization S&A system is expected to apply for Objective Indivisual Combat Weapon(OICW) like a small-calliber gun.