GaAs기판 식각을 이용한 수직투과형 IR 광변조기 설계 및 제작

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Publisher
한국 MEMS
Issue Date
2013-04-05
Citation

한국 MEMS 학술대회

URI
http://hdl.handle.net/10203/220363
Appears in Collection
ME-Conference Papers(학술회의논문)
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