Fabrication of high-Q chalcogenide photonic crystal resonators by e-beam lithography

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The authors report design, fabrication, and characterization of photonic crystal nanocavities in nonlinear chalcogenide glass using e-beam lithography and chemically assisted ion beam etching. The design indicated that three-hole missing cavities with simultaneously modified side hole position and radii showed the maximum quality factor of 14 000, which was insensitive to the fabrication error of side holes. The fabricated cavities presented coupling dips of -2.6 dB at the wavelength of 1550 nm and quality factors up to 10 000 when excited with the evanescent field from a tapered optical fiber. (c) 2007 American Institute of Physics.
Publisher
AMER INST PHYSICS
Issue Date
2007-02
Language
English
Article Type
Article
Keywords

WAVE-GUIDES; NANOCAVITY; SLAB

Citation

APPLIED PHYSICS LETTERS, v.90, pp.2800 - 2804

ISSN
0003-6951
DOI
10.1063/1.2476416
URI
http://hdl.handle.net/10203/21972
Appears in Collection
PH-Journal Papers(저널논문)
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