Dependence of structural and magnetic properties on deposition angle in electron-beam evaporated Co/Pt multilayer thin films

Abstract

The effects of deposition angle on the structural and magnetic properties of e-beam evaporated Co/Pt multilayer thin films prepared on tilted substrates were examined. It was found that the [111] crystallographic orientations of the multilayer thin films were not aligned with columnar growth orientations and that they remained normal to the substrate planes, irrespective of deposition angle, even though the deposition angle was severely oblique up to 60 degrees. Interestingly enough, the magnetic easy axis orientation was nearly aligned with the substrate normal, irrespective of deposition angle, which suggested that surface anisotropy was a major reason for the perpendicular anisotropy in Co/Pt multilayer thin films. (C) 1996 American Institute of Physics.