REDUCTION OF LATERAL PHOSPHORUS DIFFUSION IN CMOS NORMAL-WELLS

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Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Issue Date
1990-03
Language
English
Article Type
Note
Citation

IEEE TRANSACTIONS ON ELECTRON DEVICES, v.37, no.3, pp.806 - 807

ISSN
0018-9383
DOI
10.1109/16.47790
URI
http://hdl.handle.net/10203/214183
Appears in Collection
RIMS Journal Papers
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