이광자 광중합 공정을 이용한 3차원 미세구조물 제작기술 동향 Recent Progress in the Nanoscale Additive Layer Manufacturing Process Using Two-Photon Polymerization for Fabrication of 3D Polymeric, Ceramic, and Metallic Structures

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Recently, many studies have been conducted on the nano-scale fabrication technology using two-photon-absorbed polymerization induced by a femtosecond laser. The nano-stereolithography process has many advantages as a technique for direct fabrication of true three-dimensional shapes in the range over several microns with sub-100 nm resolution, which might be difficult to obtain by using general nano/microscale fabrication technologies. Therefore, two-photon induced nano-stereolithography has been recently recognized as a promising candidate technology to fabricate arbitrary 3D structures with sub-100 nm resolution. Many research works for fabricating novel 3D nano/micro devices using the two-photon nano-stereolithography process, which can be utilized in the NT/BT/IT fields, are rapidly advancing
Publisher
한국정밀공학회
Issue Date
2016-04
Language
Korean
Citation

한국정밀공학회지, v.33, no.4, pp.265 - 270

ISSN
1225-9071
URI
http://hdl.handle.net/10203/213684
Appears in Collection
ME-Journal Papers(저널논문)
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