Measurement of electron density using reactance cutoff probe

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This paper proposes a new measurement method of electron density using the reactance spectrum of the plasma in the cutoff probe system instead of the transmission spectrum. The highly accurate reactance spectrum of the plasma-cutoff probe system, as expected from previous circuit simulations [ Kim et al., Appl. Phys. Lett. 99, 131502 (2011)], was measured using the full two-port error correction and automatic port extension methods of the network analyzer. The electron density can be obtained from the analysis of the measured reactance spectrum, based on circuit modeling. According to the circuit simulation results, the reactance cutoff probe can measure the electron density more precisely than the previous cutoff probe at low densities or at higher pressure. The obtained results for the electron density are presented and discussed for a wide range of experimental conditions, and this method is compared with previous methods (a cutoff probe using the transmission spectrum and a single Langmuir probe). Published by AIP Publishing
Publisher
AMER INST PHYSICS
Issue Date
2016-05
Language
English
Article Type
Article
Keywords

PLASMA-DENSITY; RESONATOR

Citation

PHYSICS OF PLASMAS, v.23, no.5

ISSN
1070-664X
DOI
10.1063/1.4951029
URI
http://hdl.handle.net/10203/212289
Appears in Collection
PH-Journal Papers(저널논문)
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