Measurement and analysis of electron-neutral collision frequency in the calibrated cutoff probe

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As collisions between electrons and neutral particles constitute one of the most representative physical phenomena in weakly ionized plasma, the electron-neutral (e-n) collision frequency is a very important plasma parameter as regards understanding the physics of this material. In this paper, we measured the e-n collision frequency in the plasma using a calibrated cutoff-probe. A highly accurate reactance spectrum of the plasma/cutoff-probe system, which is expected based on previous cutoff-probe circuit simulations [Kim et al., Appl. Phys. Lett. 99, 131502 (2011)], is obtained using the calibrated cutoff-probe method, and the e-n collision frequency is calculated based on the cutoff-probe circuit model together with the high-frequency conductance model. The measured e-n collision frequency (by the calibrated cutoff-probe method) is compared and analyzed with that obtained using a Langmuir probe, with the latter being calculated from the measured electron-energy distribution functions, in wide range of gas pressure. (C) 2016 AIP Publishing LLC
Publisher
AMER INST PHYSICS
Issue Date
2016-03
Language
English
Article Type
Article
Keywords

DENSITY; PLASMAS; CONDUCTIVITY

Citation

PHYSICS OF PLASMAS, v.23, no.3, pp.033509

ISSN
1070-664X
DOI
10.1063/1.4943876
URI
http://hdl.handle.net/10203/209752
Appears in Collection
PH-Journal Papers(저널논문)
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