Computational study on reliability of sheath width measurement by the cutoff probe in low pressure plasmas

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Recently, the technique for measurement of the sheath width by using the cutoff probe and its equivalent circuit model was proposed and conducted experimentally. In this study, we investigate the reliability of this technique based on the computational simulation. The simulation of three-dimensional Finite-Difference Time-Domain reproduces the transmission spectrum of the cutoff probe with an input parameter of sheath width. We measure the sheath width by using the circuit model and calculate the discrepancy between them under various input plasma densities and sheath widths. The results show the acceptable discrepancy under all of the conditions we studied (the largest discrepancy is about 45%). This indicates that the technique for measurement of sheath width around the floating tip of cutoff probe is robust and reliable.
Publisher
IOP PUBLISHING LTD
Issue Date
2015-11
Language
English
Article Type
Article; Proceedings Paper
Citation

JOURNAL OF INSTRUMENTATION, v.10, pp.1 - 7

ISSN
1748-0221
DOI
10.1088/1748-0221/10/11/T11001
URI
http://hdl.handle.net/10203/207843
Appears in Collection
PH-Journal Papers(저널논문)ME-Journal Papers(저널논문)
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