Large step-phase measurement by a reduced-phase triple-illumination interferometer

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We present a reduced-phase triple-illumination interferometer (RPTII) as a novel single-shot technique to increase the precision of dual-illumination optical phase unwrapping techniques. The technique employs two measurement ranges to record both low-precision unwrapped and high-precision wrapped phases. To unwrap the high-precision phase, a hierarchical optical phase unwrapping algorithm is used with the low-precision unwrapped phase. The feasibility of this technique is demonstrated by measuring a stepped object with a height 2100 times greater than the wavelength of the source. The phase is reconstructed without applying any numerical unwrapping algorithms, and its noise level is decreased by a factor of ten. (C)2015 Optical Society of America
Publisher
OPTICAL SOC AMER
Issue Date
2015-05
Language
English
Article Type
Article
Keywords

DIGITAL HOLOGRAPHIC MICROSCOPY; IMAGE-RECONSTRUCTION; SHAPE MEASUREMENT; REFRACTIVE-INDEX; SPECKLE-NOISE; LATERAL-SHEAR; WAVELENGTH; OBJECTS; REDUCTION; THICKNESS

Citation

OPTICS EXPRESS, v.23, no.9, pp.11264 - 11271

ISSN
1094-4087
DOI
10.1364/OE.23.011264
URI
http://hdl.handle.net/10203/199066
Appears in Collection
GT-Journal Papers(저널논문)
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