Absolute positioning by multi-wavelength interferometry referenced to the frequency comb of a femtosecond laser

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A multi-wavelength interferometer utilizing the frequency comb of a femtosecond laser as the wavelength ruler is tested for its capability of ultra-precision positioning for machine axis control. The interferometer uses four different wavelengths phase-locked to the frequency comb and then determines the absolute position through a multi-channel scheme of detecting interference phases in parallel so as to enable fast, precise and stable measurements continuously over a few meters of axis-travel. Test results show that the proposed interferometer proves itself as a potential candidate of absolute-type position transducer needed for next-generation ultra-precision machine axis control, demonstrating linear errors of less than 61.9 nm in peak-to-valley over a 1-meter travel with an update rate of 100 Hz when compared to an incremental-type He-Ne laser interferometer.
Publisher
OPTICAL SOC AMER
Issue Date
2015-04
Language
English
Article Type
Article
Citation

OPTICS EXPRESS, v.23, no.7, pp.9121 - 9129

ISSN
1094-4087
DOI
10.1364/OE.23.009121
URI
http://hdl.handle.net/10203/198963
Appears in Collection
ME-Journal Papers(저널논문)
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