학위논문(석사) - 한국과학기술원 : 신소재공학과, 2011., [ vi, 92 p. ]
Nanolithography; 비선형 광학; 위상차 리소그래피; 3차원 나노구조물; 근접장 나노패터닝; 나노리소그래피; Proximity field nanopatterning; Three-dimensional nanostructures; Phase shift lithography; Non-linear optics
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