A 400kHz 8.6-kVA Voltage type inverter for plasma application with low parasitic oscillation = 기생 공진이 적은 플라즈마를 위한 400kHz 8.6-kVA 전압형 인버터

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Low temperature plasma is known as a key technology in variety of applications like renewable energy, environmental technology, large flat-screen display, semiconductor process, and so on. Especially, as the plasma does not leave any waste for generating, it plays a very important role in purification of green-house gases and polluting gases. So, low temperature plasma is thought as a leading technology in the future environmental technology. Environmental technology by gas treatment is one of the low temperature plasma applications that handles green-house gases and polluting gases by discharging it with plasma. To ignite and maintain such plasma, a power supply must be able to provide high operation frequency and high output power. But, as the operation frequency and the output power level of a switching converter increase, parasitic components oscillate with each other at switching transients, and the oscillation severely degrades the system reliability by causing malfunction of switching devices. This study has proposed a switching power supply with high reliability by reducing parasitic oscillation. A prototype of the proposed switching power supply has been tested and demonstrated to provide high reliability at 400kHz of high operation frequency and 8.6-kVA of high imaginary output power.
Advisors
Cho, Gyu-Hyeongresearcher조규형
Description
한국과학기술원 : 전기및전자공학과,
Publisher
한국과학기술원
Issue Date
2014
Identifier
569245/325007  / 020123351
Language
eng
Description

학위논문(석사) - 한국과학기술원 : 전기및전자공학과, 2014.2, [ ii, 38 p. ]

Keywords

parasitic oscillation; 기생 인덕턴스; 플라즈마; dc-ac 컨버터; 인버터; 고전력; high power; inverter; dc-ac converter; plasma; parasitic inductance; 기생 공진

URI
http://hdl.handle.net/10203/196773
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=569245&flag=dissertation
Appears in Collection
EE-Theses_Master(석사논문)
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