학위논문(석사) - 한국과학기술원 : 전기및전자공학과, 2014.2, [ 41 p. ]
나노리소그래피; interference lithography; grating structure; line edge roughness; surface plasmon polariton; nanolithography; 표면 플라즈몬 폴라리톤; 라인 에지 굴곡; 격자 구조; 간섭리소그래피
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