Study on Low-voltage Mechanical Switches With Stiction-recovery Actuation = 스틱션 회복 동작을 이용한 낮은 전압으로 동작하는 기계식 스위치에 관한 연구

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Mechanical switches have the distinct advantages of high isolation, low on-resistance, low power consumption and abrupt switching characteristics; however, their high actuation voltage impedes wider usage. In this work, the problem of the high actuation voltage is solved in two ways. First, a novel electrode design is proposed and fabricated with cantilever-type switches. Introduction of the electrode enabled reduction of the actuation voltage to just 60 % of the level attained with conventional design. Moreover, faster switching and higher level of endurance could be achieved owing to the new electrode design. Second, an ultimate low-voltage torsional switch is proposed adopting stiction-recovery actuation. With advanced hinge design, actuation voltage was reduced to 1.5 V which is far lower than that of other mechanical switches. Moreover, the switch has shown the best performance in view of low-power consumption and reliability among other mechanical switches targeting mechanical logic application. As an example of possible applications, the switch was combined with TFT to comprise MEMS-TFT hybrid inverter and its electrical characteristics were demonstrated.
Advisors
Yoon, Jun-Boresearcher윤준보
Description
한국과학기술원 : 전기및전자공학과,
Publisher
한국과학기술원
Issue Date
2013
Identifier
566023/325007  / 020095019
Language
eng
Description

학위논문(박사) - 한국과학기술원 : 전기및전자공학과, 2013.8, [ v, 119 p. ]

Keywords

멤스; stiction; pull-in voltage; mechanical logic; mechanical switch; MEMS; 기계식 스위치; 기계식 로직; 풀인 전압; 스틱션

URI
http://hdl.handle.net/10203/196498
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=566023&flag=dissertation
Appears in Collection
EE-Theses_Ph.D.(박사논문)
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