Micro-arc ignition on the oily surface of capacitively-coupled plasma

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Micro-arc ignition on the oily surface is investigated in a capacitively-coupled plasma (CCP) system. In this system, micro-arc generation is enhanced by increased level of plasma potential, which is induced by a DC-grounded coil between blocking capacitor and the powered electrode. The images of micro-arcs are captured with very short exposure time of 20 ms using intensified charge-coupled device triggered by a high speed comparator and the focused ground electrode is partially soiled with oil. The micro-arcs are observed only on the oily surface of the electrode. This observation provides that the oily surface of CCP is very weak for micro-arc ignition and micro-arc ignition is supposed to be enhanced by the oil evaporation and the thin oil layer, considering the RF Paschen breakdown of the oil vapor within the sheath and the dielectric breakdown of thin oil layer.
Publisher
ELSEVIER SCIENCE BV
Issue Date
2015-03
Language
English
Article Type
Article
Keywords

ARGON GLOW-DISCHARGES; ELECTRICAL BREAKDOWN; PLANAR SYSTEM; RF; INITIATION; VACUUM; INCLUSIONS

Citation

CURRENT APPLIED PHYSICS, v.15, no.3, pp.313 - 318

ISSN
1567-1739
DOI
10.1016/j.cap.2014.12.021
URI
http://hdl.handle.net/10203/195854
Appears in Collection
PH-Journal Papers(저널논문)
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