DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Jinwon | ko |
dc.contributor.author | Lee, Yun-Seong | ko |
dc.contributor.author | Chang, Hong-Young | ko |
dc.contributor.author | An, Sang-Hyuk | ko |
dc.date.accessioned | 2015-03-27T08:06:19Z | - |
dc.date.available | 2015-03-27T08:06:19Z | - |
dc.date.created | 2014-11-11 | - |
dc.date.created | 2014-11-11 | - |
dc.date.issued | 2014-08 | - |
dc.identifier.citation | PHYSICS OF PLASMAS, v.21, no.8 | - |
dc.identifier.issn | 1070-664X | - |
dc.identifier.uri | http://hdl.handle.net/10203/194543 | - |
dc.description.abstract | In this study, we attempted to determine the possibility of multiple inductively coupled plasma (ICP) and helicon plasma sources for large-area processes. Experiments were performed with the one and two coils to measure plasma and electrical parameters, and a circuit simulation was performed to measure the current at each coil in the 2-coil experiment. Based on the result, we could determine the possibility of multiple ICP sources due to a direct change of impedance due to current and saturation of impedance due to the skin-depth effect. However, a helicon plasma source is difficult to adapt to the multiple sources due to the consistent change of real impedance due to mode transition and the low uniformity of the B-field confinement. As a result, it is expected that ICP can be adapted to multiple sources for large-area processes. | - |
dc.language | English | - |
dc.publisher | AMER INST PHYSICS | - |
dc.subject | DISCHARGES | - |
dc.subject | FILM | - |
dc.subject | DEPOSITION | - |
dc.subject | ANTENNA | - |
dc.title | On the possibility of the multiple inductively coupled plasma and helicon plasma sources for large-area processes | - |
dc.type | Article | - |
dc.identifier.wosid | 000342760600075 | - |
dc.identifier.scopusid | 2-s2.0-84905668823 | - |
dc.type.rims | ART | - |
dc.citation.volume | 21 | - |
dc.citation.issue | 8 | - |
dc.citation.publicationname | PHYSICS OF PLASMAS | - |
dc.identifier.doi | 10.1063/1.4892170 | - |
dc.contributor.localauthor | Chang, Hong-Young | - |
dc.contributor.nonIdAuthor | Lee, Yun-Seong | - |
dc.contributor.nonIdAuthor | An, Sang-Hyuk | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | DISCHARGES | - |
dc.subject.keywordPlus | FILM | - |
dc.subject.keywordPlus | DEPOSITION | - |
dc.subject.keywordPlus | ANTENNA | - |
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