Fabrication and integration of microprism mirrors for high-speed three-dimensional measurement in inertial microfluidic system

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Inertial microfluidics utilizes fluid inertia from high flow velocity to manipulate particles and fluids in 3D. Acquiring a 3D information of particle positions and complex flow patterns within microfluidic devices requires 3D imaging techniques such as confocal microscopy, which are often expensive and slow. Here, we report on a prism-mirror-embedded microfluidic device that allows simultaneous imaging of the top and side view of the microchannel for a high-speed, low-cost 3D imaging. The microprism mirrors are fabricated and integrated into a microfluidic system using conventional microfabrication techniques including wet etch and soft lithography. This inexpensive high quality prism mirror provides a highly reflective, smooth mirror surface with precise 45 degrees reflection angle, enabling 3D measurement of inertial migration of microparticles in a rectangular channel at speeds in excess of 10 000 frame/s.
Publisher
AMER INST PHYSICS
Issue Date
2014-09
Language
English
Article Type
Article
Keywords

PARTICLE-TRACKING; MICROSTRUCTURES; MICROCHANNELS; CAPILLARIES; CELLS; FLOW

Citation

APPLIED PHYSICS LETTERS, v.105, no.11, pp.4103

ISSN
0003-6951
DOI
10.1063/1.4895594
URI
http://hdl.handle.net/10203/194531
Appears in Collection
NT-Journal Papers(저널논문)
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