Fabrication of 15 nm curvature radius polymer tip probe on an optical fiber via two-photon polymerization and O-2-plasma ashing

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Polymer tips with 15 nm curvature radius apexes that are capable of scanning the surface of a sample have been fabricated on the surface of an optical fiber using two-photon photopolymerization (TPP) and O-2-plasma ashing with a SCR500 resin. First, the parent conical polymer tip with a 125 nm curvature radius apex was fabricated via TPP using a continuous scanning method and the accumulation of circular layers. Next, the tip was sharpened using an O-2-plasma ashing process with high reproducibility. As a result, the apex radius of curvature had a maximum reduction to 15 nm. In order to evaluate the performance of the 15 nm curvature radius polymer tip, a 30 nm thick gold layer with holes of 250 nm radius and a single layer of polystyrene beads with a 350 nm radius were imaged using a tuning-fork-based atomic force microscope. The topographic images obtained by the 15 nm polymer tip were improved in width and depth compared with those obtained by the 125 nm polymer tip due to the reduction of the imaging artifacts. This method can also be commonly used to reduce the radius of curvature of the polymer tip in order to achieve more accurate imaging.
Publisher
ELSEVIER SCIENCE BV
Issue Date
2013-11
Language
English
Article Type
Article
Citation

CURRENT APPLIED PHYSICS, v.13, no.9, pp.2064 - 2069

ISSN
1567-1739
DOI
10.1016/j.cap.2013.09.011
URI
http://hdl.handle.net/10203/192598
Appears in Collection
PH-Journal Papers(저널논문)ME-Journal Papers(저널논문)
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