Measurement of effective sheath width around cutoff probe in low-pressure plasmas

Cited 5 time in webofscience Cited 0 time in scopus
  • Hit : 351
  • Download : 0
Previous studies indicated that the measurement results of microwave probes can be improved by applying the adequate sheath width to their measurement models, and consequently the sheath width around the microwave probe tips has become very important information for microwave probe diagnostics. In this paper, we propose a method for measuring the argon plasma sheath width around the cutoff probe tips by applying the circuit model to the cutoff probe phase spectrum. The measured sheath width of the cutoff probe was found to be in good agreement with the floated sheath width calculated from the Child-Langmuir sheath law. The physical reasons for a discrepancy between the two measurements are also discussed.
Publisher
AMER INST PHYSICS
Issue Date
2014-05
Language
English
Article Type
Article
Citation

PHYSICS OF PLASMAS, v.21, no.5

ISSN
1070-664X
DOI
10.1063/1.4871720
URI
http://hdl.handle.net/10203/189428
Appears in Collection
PH-Journal Papers(저널논문)ME-Journal Papers(저널논문)
Files in This Item
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 5 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0