Plasma density measurement with ring-type cutoff probe

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We proposed a cutoff probe with a ring-type detection tip enclosing a bar-type radiation tip. A comparative study between a proposed ring-type cutoff (RTC) probe and a conventional bar-type cutoff (BTC) probe showed that the RTC probe solved the problem of the BTC probe, the large measurement uncertainty of the electron density in a capacitively coupled plasma source. This improved characteristics of the RTC probe might have originated from the geometrical structure of the RTC probe concerning the monopole antennae radiation. This proposed cutoff probe can be expected to expand the applicable diagnostic range and to enhance the sensitivity of the cutoff probe. (C) 2012 Elsevier B. V. All rights reserved.
Publisher
ELSEVIER SCIENCE SA
Issue Date
2013-11
Language
English
Article Type
Article; Proceedings Paper
Citation

THIN SOLID FILMS, v.547, pp.280 - 284

ISSN
0040-6090
DOI
10.1016/j.tsf.2012.11.049
URI
http://hdl.handle.net/10203/188490
Appears in Collection
PH-Journal Papers(저널논문)ME-Journal Papers(저널논문)
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