학위논문(박사) - 한국과학기술원 : 신소재공학과, 2012.8, [ ix, 158 p. ]
다결정실리콘; 기상유도결정화; 열선화학기상증착법; polycrystalline Si; vapor-induced crystallization; HWCVD; Si Epitaxy; 실리콘 에피택시
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.