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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Aerospace Engineering(항공우주공학과)AE-Conference Papers(학술회의논문)

NOVEL 3D FORCE SENSOR USING ULTRA-THIN SILICON STRAIN GAUGE BONDED ON METAL MEMBRANE

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Kim Y.D. / Lee C.S. / Kwon, Sejinresearcher
Publisher
IEEE
Issue Date
2009-06-21
Language
ENG
Citation

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, pp.1920 - 1923

URI
http://hdl.handle.net/10203/17120
Appears in Collection
AE-Conference Papers(학술회의논문)
Files in This Item
478_1539.pdf(1.18 MB)Download

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