Design and optimization of voice coil motor for application in active vibration isolation

Abstract

To control the vibration transmitted from ground to the nano-precision measuring instruments has always been of great interest among the researchers. Vibration isolators typically reduce the vibration transmitted to the measuring instrument providing managed stiffness and damping through the transmitted path. Active isolators use control algorithms such as feedback or feed forward to provide the necessary control signal. In this paper, we propose optimized design of a voice coil motor (VCM) that can be used as an actuator to implement a suitable controller for active isolation using feedback control to attenuate the low frequency vibration of all six rigid body modes. Necessary force requirement has also been considered. (c) 2007 Elsevier B.V. All rights reserved.