X-선 리소그래피공정의 무기물 입도에 따른 격벽 형상정밀도 특성Shape Accuracy Improvement of barrier ribs using Sub-micron Inorganic Powder in X-ray lithography
- Publisher
- 한국정밀공학회
- Issue Date
- 2007
- Language
- KOR
- Citation
한국정밀공학회 2007년도 춘계학술대회 , pp.183 - 184
- Appears in Collection
- ME-Conference Papers(학술회의논문)ME-Conference Papers(학술회의논문)
- Files in This Item
- There are no files associated with this item.
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