나노 기둥 압축 시험을 이용한 UV-경화 폴리머의 기계적 물성 측정

Abstract

In this study, we adopt an advanced nanoindentation test, Nano Pillar Compression Test (NPCT), to measure compression properties of polymeric micro/nano structures. Nano Stereo Lithography (NSL) and Focused Ion Beam (FIB) milling are utilized to fabricate UV-curable polymeric pillars with different diameters between 10㎛ and 500㎚ on Si substrate. The uniaxial compression test is performed on each polymeric pillar using a nanoindentation apparatus with a flat-ended diamond punch tip, and the compression properties of UV-curable polymer are extracted from measured load-displacement data. The dependency of compression properties on loading condition and specimen size are discussed.