TUNABLE MICRO-RESONATORS WITH ELECTROTHERMAL AND PIEZOLELECTRIC ACTUATORS

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Issue Date
2005-07-11
Language
ENG
Citation

Twelfth International Congress on Sound and Vibration, pp.1 - 8

URI
http://hdl.handle.net/10203/147131
Appears in Collection
OSE-Conference Papers(학술회의논문)
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