Fabrication of 2D, 3D SiCN Ceramic nanostructures using nano-imprinting lithography and nano-stereolithography

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Issue Date
2005-11-01
Language
ENG
Citation

ISNM 2005, pp.0 - 0

URI
http://hdl.handle.net/10203/147069
Appears in Collection
ME-Conference Papers(학술회의논문)
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