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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

고종횡비 나노팁을 가진 ZnO 압전 캔티레버의 제작에 대한 연구

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이상훈 / 이승섭researcher / 전종업 / 노광춘
Issue Date
2003-05
Language
KOR
Citation

제5회 한국 MEMS 학술대회

URI
http://hdl.handle.net/10203/147064
Appears in Collection
ME-Conference Papers(학술회의논문)
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