분산형 백색광 간섭계를 이용한 박막 두께 측정Dispersive White-light Interferometry for Thin-film Thickness Measurement

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Publisher
한국광학회
Issue Date
2005-07-14
Language
KOR
Citation

한국광학회 2005년도 하계학술발표회, pp.24 - 25

URI
http://hdl.handle.net/10203/143302
Appears in Collection
ME-Conference Papers(학술회의논문)
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