DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kwak, Yoon Keun | - |
dc.date.accessioned | 2013-03-17T02:55:45Z | - |
dc.date.available | 2013-03-17T02:55:45Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2003-03-01 | - |
dc.identifier.citation | 2003 International Conference on Characterization and Metrology for ULSI Technology, v.683, no., pp.753 - 757 | - |
dc.identifier.uri | http://hdl.handle.net/10203/139138 | - |
dc.language | ENG | - |
dc.title | One dimensional Spectroscopic Measurement of Patterned Structures Using a Custom-built Spectral Imaging Ellipsometer | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.volume | 683 | - |
dc.citation.beginningpage | 753 | - |
dc.citation.endingpage | 757 | - |
dc.citation.publicationname | 2003 International Conference on Characterization and Metrology for ULSI Technology | - |
dc.identifier.conferencecountry | United States | - |
dc.identifier.conferencecountry | United States | - |
dc.contributor.localauthor | Kwak, Yoon Keun | - |
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