Incident Angle Auto-alignment of Ellipsometer using Precision 3-Axis stage with Kinematic coupling
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Jeong, JH | ko |
| dc.contributor.author | Park, Sl | ko |
| dc.contributor.author | Gweon, Dae-Gab | ko |
| dc.date.accessioned | 2013-03-16T22:23:06Z | - |
| dc.date.available | 2013-03-16T22:23:06Z | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.created | 2012-02-06 | - |
| dc.date.issued | 2000-10 | - |
| dc.identifier.citation | Proc.of ASPE 2000 Annual Meeting | - |
| dc.identifier.uri | http://hdl.handle.net/10203/136549 | - |
| dc.language | English | - |
| dc.publisher | ASPE | - |
| dc.title | Incident Angle Auto-alignment of Ellipsometer using Precision 3-Axis stage with Kinematic coupling | - |
| dc.type | Conference | - |
| dc.identifier.wosid | 000175586200052 | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | Proc.of ASPE 2000 Annual Meeting | - |
| dc.identifier.conferencecountry | US | - |
| dc.contributor.localauthor | Gweon, Dae-Gab | - |
| dc.contributor.nonIdAuthor | Jeong, JH | - |
| dc.contributor.nonIdAuthor | Park, Sl | - |
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