<110> 실리콘 기판상에 형성된 p+ Cantilever를 이용한 AFM Probe Tip의 제작
- Issue Date
- 1999
- Language
- KOR
- Citation
MEMS 학술대회, pp.145 - 150
- Appears in Collection
- RIMS Conference Papers
- Files in This Item
- There are no files associated with this item.
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