DSpace at KOASAS: Study on the Electrostriction of PZT Thin Film Bimorph Actuator for Mass Sensor with Self-Sensing

DSpace at KOASAS

College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

Study on the Electrostriction of PZT Thin Film Bimorph Actuator for Mass Sensor with Self-Sensing

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최시경 researcher / 유동주

Issue Date: 2002

Language: KOR

Citation: 한국세라믹학회, pp.87 -

URI: http://hdl.handle.net/10203/135212

Appears in Collection: MS-Conference Papers(학술회의논문)

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Study on the Electrostriction of PZT Thin Film Bimorph Actuator for Mass Sensor with Self-Sensing

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