Browse "Dept. of Mechanical Engineering(기계공학과)" by Subject ICP

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Effect of Process Parameters on TSV Formation Using Deep Reactive Ion Etching

Kim, Kwang-Seok; Lee, Young-Chul; Ahn, Jee-Hyuk; Song, Jun Yeob; Yoo, Choong D.researcher; Jung, Seung-Boo, KOREAN JOURNAL OF METALS AND MATERIALS, v.48, no.11, pp.1028 - 1034, 2010-11

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