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1
DRIE 공정 변수에 따른 TSV 형성에 미치는 영향

김광석; 이영철; 안지혁; 송준엽; 유중돈researcher; 정승부, 대한금속·재료학회지, v.48, no.11, pp.1028 - 1034, 2010-11

2
Effect of Process Parameters on TSV Formation Using Deep Reactive Ion Etching

Kim, Kwang-Seok; Lee, Young-Chul; Ahn, Jee-Hyuk; Song, Jun Yeob; Yoo, Choong D.researcher; Jung, Seung-Boo, KOREAN JOURNAL OF METALS AND MATERIALS, v.48, no.11, pp.1028 - 1034, 2010-11

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