Browse "Dept. of Mechanical Engineering(기계공학과)" by Subject imaging ellipsometer

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A new spectral imaging ellipsometer for measuring the thickness of patterned thin films

Chegal, W; Cho, YJ; Kim, HJ; Cho, HM; Lee, YW; Kim, Soohyunresearcher, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, v.43, pp.6475 - 6476, 2004-09

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