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Deep X-ray mask with integrated actuator for 3D microfabrication Lee, KC; Lee, Seung Seob, SENSORS AND ACTUATORS A-PHYSICAL, v.108, no.1-3, pp.121 - 127, 2003-11 |
Deep X-ray mask with integrated electro-thermal micro xy-stage for 3D fabrication Lee, KC; Lee, Seung Seob, SENSORS AND ACTUATORS A-PHYSICAL, v.111, no.1, pp.37 - 43, 2004 |
Fabrication of HAR-nano structures using a nano X-ray shadow mask = 나노 X-ray 쉐도우 마스크를 이용한 고종횡비의 나노 구조물 제작에 관한 연구link Kim, Yong-Chul; 김용철; et al, 한국과학기술원, 2008 |
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