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Micro/nano-heater integrated cantilevers for micro/nano-lithography applications Lee, Dong-Weon; Oh, Il-Kwon, MICROELECTRONIC ENGINEERING, v.84, no.5-8, pp.1041 - 1044, 2007-05 |
Piezo-driven metrological multiaxis nanopositioner Shim, JY; Gweon, Dae-Gab, REVIEW OF SCIENTIFIC INSTRUMENTS, v.72, no.11, pp.4183 - 4187, 2001-11 |
Precise rotary motor by inchworm motion using dual wrap belts Kim, SC; Kim, Soohyun, REVIEW OF SCIENTIFIC INSTRUMENTS, v.70, no.5, pp.2546 - 2550, 1999-05 |
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