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Optimal design of high precision XY-scanner with nanometer-level resolution and millimeter-level working range Kang, Dongwoo; Kim, Kihyun; Kim, Dongmin; Shim, Jongyoup; Gweon, Dae-Gab; Jeong, Jaehwa, MECHATRONICS, v.19, no.4, pp.562 - 570, 2009-06 |
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