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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Deep X-ray Mask Embedded in Electrostatic Actuator for 3-D LIGA Process

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Lee, KC / Lee, SG / Moon, SJ / Lee, Seung Seobresearcher
Issue Date
2001
Language
ENG
Citation

32nd Int. Sym. on Robotics, pp.1969 - 1972

URI
http://hdl.handle.net/10203/128709
Appears in Collection
ME-Conference Papers(학술회의논문)
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