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College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Conference Papers(학술회의논문)

The effects of Sr/Ti ratio on the step coverage of SrTiO3 thin films fabricated using ECR-PEMOCVD

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Park, SY / Choi, J / No, Kwangsooresearcher
Publisher
IEEE
Issue Date
2000-07-21
Language
English
Citation

12th IEEE International Symposium on Applications of Ferroelectrics, pp.59 - 63

URI
http://hdl.handle.net/10203/128469
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MS-Conference Papers(학술회의논문)
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