비등간격 수평감지 전극구조의 정전용량형 다결정 실리콘 가속도계

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 518
  • Download : 0
Issue Date
1998-04-11
Language
KOR
Citation

대한전기학회 MEMS연구회 학술 발표회, pp.149 - 154

URI
http://hdl.handle.net/10203/120652
Appears in Collection
BiS-Conference Papers(학술회의논문)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0