Thin film integral capacitor fabricated on a polymer dielectric for high density interconnect (HDI) applications

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Issue Date
1995-04-17
Language
ENG
Citation

Proceedings of the Spring Meeting on MRS, v.390, pp.33 - 38

ISSN
0272-9172
URI
http://hdl.handle.net/10203/117813
Appears in Collection
MS-Conference Papers(학술회의논문)
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