Thin-film thickness profile and its refractive index measurements by dispersive white-light interferometry

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dc.contributor.authorGhim, Young-Sikko
dc.contributor.authorKim, Seung-Wooko
dc.date.accessioned2007-08-21T05:27:30Z-
dc.date.available2007-08-21T05:27:30Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2006-11-
dc.identifier.citationOPTICS EXPRESS, v.14, no.24, pp.11885 - 11891-
dc.identifier.issn1094-4087-
dc.identifier.urihttp://hdl.handle.net/10203/1074-
dc.description.abstractAs an extension of the authors' previous report of Ref 1, we describe an improved version of dispersive white- light interferometry that enables us to measure the tomographical thickness profile of a thin- film layer through Fourier- transform analysis of spectrally- resolved interference signals. The group refractive index can also be determined without prior knowledge of the geometrical thickness of the film layer. Owing to fast measurement speed with no need of mechanical depth scanning, the proposed method is well suited for in- line 3- D inspection of dielectric thinfilm layers particularly for the semiconductor and flat- panel display industry. (c) 2006 Optical Society of America.-
dc.description.sponsorshipThis work was supported by the Creative Research Initiatives Program of the Ministry of Science and Technology in the Republic of Korea.en
dc.languageEnglish-
dc.language.isoen_USen
dc.publisherOptical Soc Amer-
dc.subjectABSOLUTE DISTANCE MEASUREMENT-
dc.subjectACOUSTOOPTIC TUNABLE FILTER-
dc.subjectPROFILOMETRY-
dc.titleThin-film thickness profile and its refractive index measurements by dispersive white-light interferometry-
dc.typeArticle-
dc.identifier.wosid000242325700045-
dc.identifier.scopusid2-s2.0-34548391656-
dc.type.rimsART-
dc.citation.volume14-
dc.citation.issue24-
dc.citation.beginningpage11885-
dc.citation.endingpage11891-
dc.citation.publicationnameOPTICS EXPRESS-
dc.identifier.doi10.1364/OE.14.011885-
dc.embargo.liftdate9999-12-31-
dc.embargo.terms9999-12-31-
dc.contributor.localauthorKim, Seung-Woo-
dc.contributor.nonIdAuthorGhim, Young-Sik-
dc.type.journalArticleArticle-
dc.subject.keywordPlusABSOLUTE DISTANCE MEASUREMENT-
dc.subject.keywordPlusACOUSTOOPTIC TUNABLE FILTER-
dc.subject.keywordPlusPROFILOMETRY-
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