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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

Design of an Ultraprecision Stepping Stage for Lithography of Next Generation Integrated-Circuit Chips

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dc.contributor.authorKim, Seung-Woo-
dc.contributor.authorPark, S.H-
dc.contributor.authorLee, C.W.-
dc.date.accessioned2013-03-14T09:07:17Z-
dc.date.available2013-03-14T09:07:17Z-
dc.date.created2012-02-06-
dc.date.issued1994-
dc.identifier.citationUltraprecision Manufacturing Engineering 3, v., no., pp.39 - 42-
dc.identifier.urihttp://hdl.handle.net/10203/107286-
dc.languageENG-
dc.titleDesign of an Ultraprecision Stepping Stage for Lithography of Next Generation Integrated-Circuit Chips-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.beginningpage39-
dc.citation.endingpage42-
dc.citation.publicationnameUltraprecision Manufacturing Engineering 3-
dc.identifier.conferencecountryGermany-
dc.identifier.conferencecountryGermany-
dc.contributor.localauthorKim, Seung-Woo-
dc.contributor.nonIdAuthorPark, S.H-
dc.contributor.nonIdAuthorLee, C.W.-
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ME-Conference Papers(학술회의논문)
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