The beam divergence of an indium LMIS at a distance of 50 mu m as determined by plasma diagnostic measurements

Abstract

The current-dependent beam divergence at a distance of 50 pm from an indium-liquid metal ion source is derived from experimental data obtained by measuring the beam spread with a 3D Plasma diagnostic system at a distance of 10 cm from the needle tip. The observed relationship between emission current and beam divergence in vicinity of the emitting needle is used to design a focusing electrode for a field-emission electric propulsion thruster operating at currents up to 150 mu A. Another application involves focused ion beam columns which may choose to forego a beam-limiting aperture, such as LMIS-based rapid machining tools with large beam currents. (C) 2011 Elsevier B.V. All rights reserved.