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Cleaning Plan Optimization for Dual-Armed Cluster Tools With General Chamber Cleaning Periods Lee, Tae-Gyung; Yu, Tae-Sun; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.20, no.3, pp.1890 - 1906, 2023-07 |
Time-Feasible Reachability Tree for Noncyclic Scheduling of Timed Petri Nets Kim, Hyunjung; Lee, Jun-Ho; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.12, no.3, pp.1007 - 1016, 2015-07 |
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