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Low-Temperature Growth of Indium Oxide Thin Film by Plasma-Enhanced Atomic Layer Deposition Using Liquid Dimethyl(N-ethoxy-2,2-dimethylpropanamido)indium for High-Mobility Thin Film Transistor Application

Kim, Hyo Yeon; Jung, Eun Ae; Mun, Geumbi; Agbenyeke, Raphael E.; Park, Bo Keun; Park, Jin-Seong; Son, Seung Uk; et al, ACS APPLIED MATERIALS & INTERFACES, v.8, no.40, pp.26924 - 26931, 2016-10

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