Browse by Subject ultraviolet lithography

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1

Improved oxidation resistance of Ru/Si capping layer for extreme ultraviolet lithography reflector

Park, JeongYoungresearcher; Belau, L; Seo, H; Somorjai, GA, JOURNAL OF VACUUM SCIENCE TECHNOLOGY B, v.29, no.4, 2011-07

2

The effects of oxygen plasma on the chemical composition and morphology of the Ru capping layer of the extreme ultraviolet mask blanks

Belau, L; Park, JeongYoungresearcher; Liang, T; Somorjai, GA, JOURNAL OF VACUUM SCIENCE TECHNOLOGY B, v.26, no.6, pp.2225 - 2229, 2008-11

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